منابع مشابه
Ice lithography for nanodevices.
We report the successful application of a new approach, ice lithography (IL), to fabricate nanoscale devices. The entire IL process takes place inside a modified scanning electron microscope (SEM), where a vapor-deposited film of water ice serves as a resist for e-beam lithography, greatly simplifying and streamlining device fabrication. We show that labile nanostructures such as carbon nanotub...
متن کاملAn ice lithography instrument.
We describe the design of an instrument that can fully implement a new nanopatterning method called ice lithography, where ice is used as the resist. Water vapor is introduced into a scanning electron microscope (SEM) vacuum chamber above a sample cooled down to 110 K. The vapor condenses, covering the sample with an amorphous layer of ice. To form a lift-off mask, ice is removed by the SEM ele...
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We demonstrate that a low energy focused electron beam can locally pattern graphene coated with a thin ice layer. The irradiated ice plays a crucial role in the process by providing activated species that locally remove graphene from a silicon dioxide substrate. After patterning the graphene, the ice resist is easily removed by sublimation to leave behind a clean surface with no further process...
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Advances in nanotechnology have made it possible to assemble nanostructures into a wide range of micrometer-scale sensors, actuators, and other novel devices... and to place thousands of such devices on a single chip. Most of these devices can benefit from intelligent control, but the control often requires full programmability for each device’s controller. Routing thousands of signals off-chip...
متن کاملNanodevices for the Life Sciences.
Works intended for this column should be sent direct to the Book-Review Editor, whose address appears in this issue. All reviews are also available from Crystallography Journals Online, supplemented where possible with direct links to the publisher's information. The potential impact of nanotechnology on the life sciences is one of the main motivations for the worldwide increase of government a...
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ژورنال
عنوان ژورنال: Nano Letters
سال: 2010
ISSN: 1530-6984,1530-6992
DOI: 10.1021/nl1032815